Specifications

• Maximum Flow Rate
  0.71 cfm
• Port Size
  1/2 BSPT
• Voltage / Hz
  200 V ac / 50 Hz, 200 to 208 V ac / 60 Hz
• Included Options
  Analog Communication
• Fluid Comp
  Water
• Standards Met
  CE, SEMI, Sematech, UL
• Maximum Operating Pressure
  0.7 Mpa2
• Material
  Brass, Copper, EPDM, Fluororesin, PPS, Silicone, Stainless Steel
• Operating Temperature Range
  -20 to +40 °C
• Overall Length
  870 mm
• Overall Height
  950 mm
• Overall Width
  380 mm