Overview
Mfr description
LVD20-S062-1 HIGH PURITY AIR OPERATED
- High purity, compact type with integral fittings
- Mounting base dimensions conform to SEMI standard F65-1101 (Except for LVD10)
- New PFA body
- Piping from 4 directions are possible
- Variety of tubing sizes available
Compliance & Safety Data
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