Overview
Mfr description
7010381673 3M BETAPURE AUL SERIES
- For industrial/occupational use only. Not for consumer sale or use.
- Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
- Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
- The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration
Specifications
- Overall Length5 in
- Overall Width2.92 in
- Weight7.840 oz
Compliance & Safety Data
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