Overview

• Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts)
• Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-)
• Types 10-, 11- and 22- are available with ball bushing or slide bearings
• Types 12- and 21- have ball bushing bearings